A. Hartmann et al., Structure and optical properties of semiconductor quantum nanostructures self-formed in inverted tetrahedral pyramids, J PHYS-COND, 11(31), 1999, pp. 5901-5915
We present a method for fabricating quantum dots using seeded self-organize
d growth of GaAs/AlGaAs heterostructures on substrates patterned with inver
ted pyramids. This method produces, at the tip of each inverted pyramid, hi
ghly uniform quantum dots whose size and position can be accurately control
led. In addition, a system of connected GaAs and AlGaAs two- and one-dimens
ional nanostructures is identified in the inverted pyramids using cross-sec
tional atomic force microscopy. A substrate removal technique is used to op
timally prepare our samples for optical studies, allowing the increase of t
he luminescence efficiency of the quantum dots by up to three orders of mag
nitude. Micro-photoluminescence and cathodo-luminescence spectroscopy are u
sed to study in detail the bandgap structure of the connected nanostructure
s identified in the pyramids, which constitute a complex, bur controlled, b
arrier environment for the quantum dots.