Enhanced backscatter has been used to characterize rough, irregular substra
tes and polydispersions of contaminants on a substrate. For monodisperse co
ntaminants, the enhanced-backscatter peak can be obscured by the structure
of the total intensity signal. Averaging backscatter intensities from a sub
strate contaminated by monodisperse contaminants when the system is illumin
ated by plane waves of different incident angles removes the structure of t
he individual intensity signals, isolating the backscatter peak. The result
ing peak contains information which can be used to characterize the contami
nants. We demonstrate this technique by modeling the size and shape of this
peak for monodisperse spherical contaminants on a substrate and comparing
these results with experimental measurements. Published by Elsevier Science
Ltd.