Effective-refractive-index method for a flying-height sensor using frustrated total reflection and its application to flying-height measurement on anactual magnetic disk
S. Mori et al., Effective-refractive-index method for a flying-height sensor using frustrated total reflection and its application to flying-height measurement on anactual magnetic disk, JSME C, 42(2), 1999, pp. 316-322
Citations number
5
Categorie Soggetti
Mechanical Engineering
Journal title
JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING
It is necessary to measure the flying height of a slider on an actual magne
tic disk when designing magnetic disk drives. However in typical methods fo
r measuring spacing, the magnetic disk is usually replaced with a glass dis
k, To measure this real spacing, we developed a flying-height sensor based
on frustrated total reflection. However, to measure the real flying height
optically, the phase shift on reflection at a magnetic disk is an important
problem. We developed a theoretical treatment of this problem and introduc
ed the modified effective-refractive-index method. We measured the effectiv
e-refractive-index of an actual magnetic disk. Flying height on the magneti
c disk was also measured by using the obtained effective-refractive-index.
This result was compared with the flying heights measured by using the trad
itional interference method. Both measurements agreed well with an error of
less than 2 nm.