Transport phenomena in sublimation growth of SiC bulk crystals

Citation
As. Segal et al., Transport phenomena in sublimation growth of SiC bulk crystals, MAT SCI E B, 61-2, 1999, pp. 40-43
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
ISSN journal
09215107 → ACNP
Volume
61-2
Year of publication
1999
Pages
40 - 43
Database
ISI
SICI code
0921-5107(19990730)61-2:<40:TPISGO>2.0.ZU;2-3
Abstract
Sublimation growth of SIC bulk crystals in the atmosphere of concentrated m ulti-component vapor is studied using a specially developed model of transp ort processes coupled with heterogeneous reactions at the source and the se ed surfaces. The convective and multi-component diffusion mechanisms of the gas phase transport, dependence of the pressure level inside the growth ch amber on the growth conditions, and kinetic jumps of the species partial pr essures at the Knudsen layers on the reactive surfaces are taken into accou nt in the model. The latter effect is described by introduction of novel bo undary conditions representing extension of the Hertz-Knudsen relationship for the case of multicomponent vapor. The results of calculations are shown to be in a good agreement with the available experimental data. (C) 1999 E lsevier Science S.A. All rights reserved.