Organic materials challenges for 193 nm imaging

Authors
Reichmanis, E Nalamasu, O Houlihan, FM
Citation
E. Reichmanis et al., Organic materials challenges for 193 nm imaging, ACC CHEM RE, 32(8), 1999, pp. 659-667
Citations number
50
Categorie Soggetti
Chemistry & Analysis",Chemistry
Journal title
ACCOUNTS OF CHEMICAL RESEARCH
ISSN journal
00014842 → ACNP
Volume
32
Issue
8
Year of publication
1999
Pages
659 - 667
Database
ISI
SICI code
0001-4842(199908)32:8<659:OMCF1N>2.0.ZU;2-7