Property, application and preparation of diamond-like film

Authors
Citation
F. Liang et Xj. Yan, Property, application and preparation of diamond-like film, ACT PHY C E, 48(6), 1999, pp. 1095-1102
Citations number
10
Categorie Soggetti
Physics
Journal title
WULI XUEBAO
ISSN journal
10003290 → ACNP
Volume
48
Issue
6
Year of publication
1999
Pages
1095 - 1102
Database
ISI
SICI code
1000-3290(199906)48:6<1095:PAAPOD>2.0.ZU;2-0
Abstract
We present the structure features of diamond-like films, discuss the relati on between the coefficients in the preparation of diamond-like films-and an alyse how these coefficients affect the structure and property of the films in detail.