Permanent holographic recording in indium oxide thin films using 193 nm excimer laser radiation

Permanent holographic recording in sputtered indium oxide (InOx) thin films is demonstrated, using ultraviolet radiation at 193 nm emitted by an ArF e xcimer laser. Steady-state refractive index changes of up to 5 x 10(-3) are calculated from the measured diffraction efficiency of a HeNe laser probe beam. The recorded gratings exhibit a dynamic behaviour that relaxes to a s teady-state value that depends on the oxygen partial pressure used during g rowth and on the recording beam intensity. The observed behaviour is explai ned in terms of laser-induced structural changes.