Nanometric SiC powder was prepared by chemical vapor deposition at 1100 deg
rees C, and samples were subsequently treated by rapid thermal annealing at
600-1100 degrees C. The intensities of the blue photoluminescence were the
n measured at room temperature. The peak intensity at 2.56 eV (484 nm) rise
s with annealing temperature, reaching a value about 9.2 times as high at 8
00 degrees C, then drops very quickly at 900 degrees C. Based on the result
s of x-ray diffraction, infrared spectroscopy, x-ray photoelectron spectros
copy and transmission electron microscopy, we conclude that the amounts of
the twofold coordinated Si on the surface of the nanometric Sic particles p
lay an important role in the photoluminescence intensity.