Synthesis of chromium nitride films by ion-beam-enhanced-deposition

Authors
Fu, YQ Zhu, XD Tang, B Hu, XF He, JW Xu, KW
Citation
Yq. Fu et al., Synthesis of chromium nitride films by ion-beam-enhanced-deposition, MATER LETT, 40(4), 1999, pp. 192-197
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS LETTERS
ISSN journal
0167577X → ACNP
Volume
40
Issue
4
Year of publication
1999
Pages
192 - 197
Database
ISI
SICI code
0167-577X(199908)40:4<192:SOCNFB>2.0.ZU;2-3
Abstract
Chromium nitride (CrN) thin films were synthesized by ion-beam-enhanced-dep osition (IBED) process. Results showed that the ion bombardment energy and the ion beam current had significant effects on microstructure, microhardne ss, crystalline structure and tribological behavior of thin films. (C) 1999 Elsevier Science B.V. All rights reserved.