Torque elimination fittings prevent ultra-high purity gas corrosion site

The standard metal face seal fitting is used throughout the semiconductor i ndustry on process lines that span the range from high pressure to high vac uum. Leakage of fluids out of a system may be catastrophic in those contain ing toxic, corrosive, or pyrophoric materials. Leakage of moisture and part icles into a system has a negative impact on product yields and life expect ancy of a gas system because of internal corrosion. This article addresses leakage both into and but of a gas system from fittings under normal and mo re challenging applications. Torque elimination enhances the reliable funct ioning of metal face seal fittings that are exposed to shock/vibration.