Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons

Citation
Av. Phelps et Zl. Petrovic, Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons, PLASMA SOUR, 8(3), 1999, pp. R21-R44
Citations number
172
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252 → ACNP
Volume
8
Issue
3
Year of publication
1999
Pages
R21 - R44
Database
ISI
SICI code
0963-0252(199908)8:3<R21:CDABIA>2.0.ZU;2-#
Abstract
We review the data and models describing the production of the electrons, t ermed secondary electrons, that initiate the secondary and subsequent feedb ack avalanches required for the growth of current during breakdown and for the maintenance of low-current, cold-cathode discharges in argon. First we correlate measurements of the production of secondary electrons at metallic cathodes, i.e. the yields of electrons induced by Ar+ ions, fast Ar atoms, metastable atoms and vuv photons. The yields of electrons per ion, fast at om and photon vary greatly with particle energy and surface condition. Then models of electron, ion, fast atom, excited atom and photon transport and kinetics are fitted to electrical-breakdown and low-current, discharge-main tenance data to determine the contributions of various cathode-directed spe cies to the secondary electron production. Our model explains measured brea kdown and low-current discharge voltages for Ar over a very wide range of e lectric field to gas density ratios E/n, i.e. 15 Td to 100 kTd, We review c orrections for nonequilibrium electron motion near the cathode that apply t o our local-field model of these discharges. Analytic expressions for the c ross sections and reaction coefficients used by this and related models are summarized.