A highly sensitive quartz-crystal microbalance for sputtering investigations in slow ion-surface collisions

Authors
Hayderer, G Schmid, M Varga, P Winter, HP Aumayr, F
Citation
G. Hayderer et al., A highly sensitive quartz-crystal microbalance for sputtering investigations in slow ion-surface collisions, REV SCI INS, 70(9), 1999, pp. 3696-3700
Citations number
19
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
REVIEW OF SCIENTIFIC INSTRUMENTS
ISSN journal
00346748 → ACNP
Volume
70
Issue
9
Year of publication
1999
Pages
3696 - 3700
Database
ISI
SICI code
0034-6748(199909)70:9<3696:AHSQMF>2.0.ZU;2-T
Abstract
A quartz-crystal microbalance technique for measuring total sputter yields in ion-surface collisions is described. The electronic circuit to drive the quartz crystal ensures low noise and high frequency stability. By measurin g total sputter yields for impact of singly charged ions on LiF target film s a sensitivity limit of 0.5% of a monolayer per minute could be achieved. (C) 1999 American Institute of Physics. [S0034-6748(99)03509-1].