Physical and chemical methods for thin-film deposition and epitaxial growth

Authors
Citation
Jr. Arthur, Physical and chemical methods for thin-film deposition and epitaxial growth, METH SURF C, 4, 1998, pp. 239-293
Categorie Soggetti
Current Book Contents
Volume
4
Year of publication
1998
Pages
239 - 293
Database
ISI
SICI code