c-axis oriented La2-xSrxCuO4 films have been prepared by the dc magnetron s
puttering method. Smooth surface morphology and excellent crystallinity of
the films are observed by SEM and TEM, respectively. It was found that the
zero resistance temperature T-c0 and the lattice parameter of the films are
strongly dependent on Sr content and oxygen partial pressure of the sputte
ring gas. Increasing the O-2:Ar ratio can remedy the oxygen deficiency and
improve the superconductivity of the films.