Influence of coverage on nucleation and growth of thin films

In nucleation process of thin film growth, stable clusters will gradually c over substrate surface. The growth will occur in the covered parts of subst rate, and the nucleation will proceed in the uncovered parts. In this paper , we investigate the influence of coverage on nucleation and growth of thin films and give a series of revised formulae for the widely used theory of thin film growth. We get that the nucleation rate is proportional to the sq uare of uncovered area. It looks rough that the nucleation rate is consider ed to be a constant in thin film theories.