The nucleation thermodynamics of dot structure growth in the groove structure

The nucleation thermodynamics of dot structure in the groove structure of s ubstrate surface by vapor deposition has been studied. A growth model of do t structure by controlling the nucleation taking place in the designed micr oscopic structure was suggested. The Gibbs free energy of the critical nucl ei formation in the groove structure was calculated, and found that the gro ove structure can effectively promote the nucleation. Finally, considering the groove structure trapping effect, we deduced that the growth rate of th e stable atomic cluster in the groove. structure is larger than that of the atomic cluster on a flat surface.