Cd. Li et Ma. Shannon, A simplified cavity analysis for estimating energy coupling during laser ablation and drilling of solids - experiment, APPL SURF S, 150(1-4), 1999, pp. 211-226
The theory for a general departure function, f, for laser-irradiated caviti
es was previously developed to estimate laser energy coupling to an opaque
solid target as a function of heat transfer and the cavity shape and size.
In this article, a specific form of f is calculated for ultraviolet (UV) la
ser ablation of copper (Cu) and aluminum (Al) targets. Methods are also giv
en for calculating the geometric factor, a, and experimentally determining
the heat transfer parameter, nu, which is shown for this form of f to be th
e intensity-dependent effective reflectivity of the material. Experimental
results for different gauges of laser energy coupling with a solid target a
re given and compared to calculations of net absorbed energy based on f and
the incident laser energy. Using the simplified cavity analysis, the resul
ts demonstrate that the experimental values for f fall within the limits pr
edicted by the theory, and that energy coupling can be predicted to within
a mean of 2% of experimental gauges. Neglecting the factors in f from calcu
lations of energy coupling can lead to large errors for laser-irradiated ca
vities, establishing that both cavity shape and treat transfer should be si
multaneously considered. In addition, a first-order sensitivity analysis ba
sed on f shows that the initial rate of change in material removal strongly
increases with reflectivity, which can lead to runaway cavity formation fo
r highly reflective materials. (C) 1999 Elsevier Science B.V. All rights re
served.