Defect characterisation in amorphous diamond-like carbon coatings

Authors
Britton, DT Harting, M Hempel, M Gxawu, D Uhlmann, K
Citation
Dt. Britton et al., Defect characterisation in amorphous diamond-like carbon coatings, APPL SURF S, 149(1-4), 1999, pp. 130-134
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
149
Issue
1-4
Year of publication
1999
Pages
130 - 134
Database
ISI
SICI code
0169-4332(199908)149:1-4<130:DCIADC>2.0.ZU;2-3
Abstract
Amorphous diamond-like carbon coatings, produced by ion beam assisted physi cal vapour deposition (IBAD) and plasma enhanced chemical vapour deposition (PECVD) on Si(100) substrates have been studied by positron beam and other techniques. Both layers have similar positron annihilation characteristics and a density of 2.4 +/- 0.3 g cm(-3), and are probably significantly hydr ogenated In the LEAD sample there is significant damage to the substrate, i ncluding a deep armorphised region and evidence of defect states at the int erface to the carbon. (C) 1999 Elsevier Science B.V. All rights reserved.