Comparison of experimental and theoretical Doppler broadening line-shape parameters

The comparison of theoretically calculated and measured Doppler broadening spectra opens up the possibility to directly identify vacancylike defects. In the past, the interpretation of different experimentally obtained defect -specific annihilation parameter has led to some confusion. In the present study, the influence of the experimental energy resolution, of the choice o f the interval limits for the determination of the Line-shape parameters, a nd of the background on the Line-shape parameters S and W is investigated. The analysis is carried out at theoretical spectra of differently sized vac ancy clusters in silicon, calculated by Hakala et al. [M. Hakala, M.J. Pusk a, R. Nieminen, Phys. Rev. B, 57 (1998) 7621]. The results are compared wit h experimental data measured for silicon self-implanted samples. The consid eration of the exact experimental conditions is very important for the comp arison of experimental spectra between each other and with theoretical calc ulations. (C) 1999 Elsevier Science B.V. All rights reserved.