Study on the crystallization behavior of amorphous carbon nitride films

Amorphous carbon nitride films were first prepared by DC reactive magnetron sputtering, followed by heat treatment under protective nitrogen. The ensu ing thermal effects were analyzed by DTA-TG, XRD and XPS. The results showe d that heat treatment above 1100 degrees C could induce the transition from an amorphous to a crystalline state of carbon nitride films. Apparent diff raction peaks of alpha-C3N4 appeared in the XRD spectra of samples heat-tre ated at 1180 degrees C. XPS results further supported the analysis of cryst allization of the films after heat treatment. (C) 1999 Elsevier Science B.V . All rights reserved.