A pulsed Nd:YAG Laser was used to evaporate solid targets of KTiOAsO4 (KTA)
at power densities of 0.6 to 2.0x10(9) W/cm(2). KTA thin films were deposi
ted on glass, Si (100). After proper annealing treatment, single phase, (or
thorh-ombic) polycrystalline KTA thin films were obtained. Some propitious
of these thin films were also examined.