Spark source mass spectrometric calibration of the local vibrational mode absorption of carbon in gallium arsenide on arsenic sublattice sites

An appropriate calibration of the local vibrational mode absorption of carb on in GaAs on arsenic sublattice sites, C-As, at wavenumber 582 cm(-1) (77 K) is presented. Integrated absorptions I-alpha of C-As, the dominant accep tor in undoped monocrystalline GaAs, and calibrated carbon concentrations [ C] were measured in single crystals using the methods FTIR and SSMS, respec tively. A calibration factor f(C) = [C]/I-alpha of (7.1 +/- 0.2) x 10(15) c m(-1) has been derived for 2.8 x 10(14) cm(-3) less than or equal to [C] le ss than or equal to 1.4 x 10(16) cm(-3) above a SSMS detection limit of [C] (DL) congruent to 1.4 x 10(13) cm(-3). The carbon concentrations [C] = [C]( SSMS)/RSCC were calibrated with a relative sensitivity coefficient RSCC = [ C](SSMS)/[C](TRUE) of 3.1 +/- 0.1. CPAA was used as a reference method for [C](CPAA) greater than or equal to 4.4 x 10(14) cm(-3) in order to approxim ate [C](TRUE).