Micro-EDM: A versatile technology for silicon micromachining

Currently, nearly all microcomponents are fabricated by microelectronic pro duction technologies like etching, deposition and other (photo)lithographic techniques. In this way, main emphasis has been put on surface micromechan ics. The major challenge for the future will be the development of real thr ee-dimensional microstructures. Electro Discharge Machining (EDM) is a so-c alled non-conventional machining technique, whereby material is removed thr ough the erosive action of electrical discharges (sparks) provided by a gen erator. As shown in this paper, Electrodischarge machining proves to be a v ersatile technique that is very well suited for machining complex microstru ctures.