Speed-energy optimization of electrostatic actuators based on pull-in

The speed and total energy required to accomplish pull-in switching of a ge neric electrostatic actuator is examined. It is found that the value of the source resistance of the voltage drive used for switching has a profound e ffect on both switching speed and energy requirements. The source resistanc e governs the charging time fur the actuating capacitor. As long as this ti me is slower than the time required to accelerate the moving mass to maximu m speed in the presence of damping, the total energy required for switching can be dramatically reduced without a significant increase in switching ti me. Indeed, there exists a clear optimum source-resistance value that minim izes the product of switching time and switching energy. These findings are demonstrated theoretically and then applied to specific examples from the literature. In addition, the limiting ease of very large source resistance, essentially a current drive, is evaluated and compared to the voltage-driv en case. It is found that for equivalent switching times, the current drive requires less total energy for a switching event.