A multilevel newton method for mixed-energy domain simulation of MEMS

An efficient black-box algorithm for self-consistent analysis of three-dime nsional (3-D) microelectromechanical systems (MEMS) is described. The algor ithm is matrix-free based and employs a multilevel Newton technique to solv e the coupled electromechanical equations. The new approach is shown to con verge very rapidly and is much faster than relaxation algorithm for tightly coupled cases. While this paper focuses on coupled electromechanical analy sis, the proposed algorithm can be extended to include several coupled doma ins typically encountered in MEMS.