The K-promoted oxidation of GaAs(110) has been studied using Auger electron
spectroscopy and principal component analysis. We found that the oxidation
process of the interface is not a properly catalytic mechanism, as the alk
ali metal reacts forming compounds that become mixed with the substrate oxi
dation products. The substrate oxidation process starts, as well as that fo
r the adsorbate, from the beginning of the oxygen exposure without showing
an adsorption stage like that observed during the oxidation process of the
clean GaAs surface. The alkali-promoted oxidation of GaAs involves the simu
ltaneous oxidation of all the elements present, K, As and Ga, and neither i
nduction nor adsorption stages are observed.