Influence of heat treatment on the film structures and magnetic propertiesof Fe-Ta-C magnetic thin films

The influence of heating treatment on the crystal structure and magnetic pr operties of Al doped Fe-Ta-C nano-crystalline thin films were studied. Crys tal Plane orientation of Fe in 9.8 mol%Al-doped Fe-Ta-C film changed from ( 110) to (200) and He increased after pre-annealing at 663 K which is lower than the crystallization temperature. Preffered orientation of Fe crystal P lane changed from (110) to (200) by substrate heating also. The crystal str ucture and magnetic properties changed very little when the heating rate fr om room temperature to the crystallization temperature of 863 K was 0.06 si milar to 0.15 K/s. On the other hand, when the cooling rate to room tempera ture from 863 K was 0.06 similar to 0.30 K/s, TaC crystalline particle size at the lower cooling rate of 0.06 K/s was found to be larger than that at the higher cooling rate. The magnetostriction of Fe in 9.8 mol%Al-doped Fe- Ta-C thin film also increased to 1.8 x 10(-6), at the cooling rate of 0.30 K/s.