A study of volatile organic compounds decomposition with the use of non-thermal plasma

Non-thermal plasma processing is an effective method to decompose diluted V OC contaminants in manufacturing rooms for the electronic industry. In this paper, two different discharge-type laboratory scale reactors (Double Diel ectric Barrier Discharge and Packed-Bed Discharge) that generate non-therma l plasma have been developed and the decomposition tests were conducted. Th e tested VOC was Benzene, Toluene, Xylene, P-cumene, Diethylether and Dichl ormethane. It was found from the experimental results for the present react ors that Benzene oxidization required higher energy than the other aromatic hydrocarbons with side branches. The decomposition efficiency was high for Cumene and Xylene (two methyl-side groups) and low for Toluene (one methyl group) and Diethylether. One of the frequently used solvents in semiconduc tor industry, Dichlormethane which can destroy atmospheric ozone layer, cou ld be decomposed in the Double Dielectric Barrier Discharge with minimum po wer consumption and the DDBD reactor had a little higher decomposition effi ciency than the Packed-Bed reactor.