Electrically conducting oxide thin films of (Sr,Ca)RuO3 and structural compatibility with (Ba,Sr)TiO3

Electrically conducting oxide thin films, CaxSr1-xRuO3, where x varies from 1 to 0, were prepared by radio frequency (RF) magnetron sputtering, and th eir structural compatibility with (Ba,Sr)TiO3 thin films was investigated. It was found that both materials crystallize into the perovskite structure, and the lattice parameter for CaxSr1-xRuO3 can be tuned to that of (Ba,Sr) TiO3 by adjusting the Ca/Sr ratio, so that the compatibility between the tw o materials at the interface is increased. Structural, chemical, and electr ical properties of the thin films and the heterostructures were characteriz ed. Cross-sectional high-resolution electron microscopy (HREM) revealed tha t the (Ba,Sr)TiO3 thin film was frown epitaxially on the (Ca,Sr)RuO3. The p otential utility of CaxSr1-xRuO3 as a bottom electrode for (Ba,Sr)TiO3 is s uggested, (C) 1999 Elsevier Science Ltd.