Chemical vapor deposition

Authors
Teyssandier, F Dollet, A
Citation
F. Teyssandier et A. Dollet, Chemical vapor deposition, PERG MAT S, 2, 1999, pp. 257-285
Categorie Soggetti
Current Book Contents
Journal title
NON-EQUILIBRIUM PROCESSING OF MATERIALS → ACNP
Volume
2
Year of publication
1999
Pages
257 - 285
Database
ISI
SICI code