SNO2 BASED GAS SENSITIVE SENSOR

Authors
BAKIN AS BESTAEV MV DIMITROV DT MOSHNIKOV VA TAIROV YM
Citation
As. Bakin et al., SNO2 BASED GAS SENSITIVE SENSOR, Thin solid films, 296(1-2), 1997, pp. 168-171
Citations number
7
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
296
Issue
1-2
Year of publication
1997
Pages
168 - 171
Database
ISI
SICI code
0040-6090(1997)296:1-2<168:SBGSS>2.0.ZU;2-U
Abstract
SnO2 films have been formed by the thermal vacuum deposition of Sn, pu re Sn doped by Te and J(2) has been formed and also Sn doped by Cu wit h post-treatment under controlled oxygen atmosphere has been formed. I odium had been introduced into the initial mixture as a SnJ(2) to form a better modified film surface for sensivity increase. The results of influence of annealing in dynamic vacuum conditions on SnO2 Alms prop erties are shown. (C) 1997 Elsevier Science S.A.