The study of sputtered barium ferrite thin films

Ba ferrite thin films were successfully prepared by using a facing target s puttering system. Magnetic, crystallized thin films were obtained both by e x-situ and in-situ processes. In this paper, thin films prepared by these t wo processes were studied on the aspects of crystal structure, magnetic pro perties and surface morphology. The mechanism of magnetization reversal of thin films prepared by both processes was discussed. It is found that the i mperfection in the thin films strongly effects the magnetic properties of t hese films.