Depth-profiled positronium lifetime spectroscopy is used to probe the pore
characteristics (size, distribution, and interconnectivity) in porous, low-
dielectric silica films. The technique is sensitive to the entire void volu
me, both interconnected and isolated, even if the film is buried beneath a
metal or oxide layer. Our extension of a simple quantum mechanical model of
Ps annihilation in a pore adequately accounts for the temperature and pore
size dependence of the Ps lifetime for pore sizes in the range from 0.1 nm
to 600 nm. It is applicable to any porous media. [S0163-1829(99)51932-2].