The possibility was investigated of synthesizing Sb-S-containing nanolayers
on the silica surface by the method of ion layering, with acetic acid SbCl
3 solutions and gaseous H2S used as reagents. The layers obtained were anal
yzed by X-ray photoelectron spectroscopy, X-ray fluorescence microanalysis,
spectroscopy of diffuse reflection and transmission in the UV and visible
spectral regions, and ellipsometry. Thermally induced transformations of na
nolayers were studied in ail, and temperature intervals were determined in
which sulfamide is oxidized to give Sb(III) and Sb(V) oxides.