On parameter estimation using level sets

Consider the problem of selecting the member of a parametrized family of cu rves that best matches a given curve. This is a key step in determining pro per values for adjustable parameters in low-order plasma etching and deposi tion models. Level set methods offer several attractive features for treati ng such problems. This paper presents a parameter estimation scheme that ex ploits the level set formulation. The method is completely geometric; there is no need to introduce an arbitrary coordinate system for the curves. Ana lytic results necessary for the application of gradient descent algorithms are derived, and some preliminary numerical results are presented.