Bk. Tay et al., Investigation of tetrahedral amorphous carbon films using X-ray photoelectron and Raman spectroscopy, SURF INT AN, 28(1), 1999, pp. 231-234
Amorphous carbon containing very little hydrogen and having a highly tetrah
edral structure has been prepared by the Filtered Cathodic Vacuum Are (FCVA
) technique under different deposition temperatures. Based on Raman measure
ment, it was found that the I-D/I-G intensity ratio, the G band peak positi
on and the linewidth change with deposition temperature. From XPS measureme
nt, it was demonstrated that four Gaussians components were required to hav
e a good fit of the C Is spectra of amorphous carbon film from which the re
lative concentration of sp(3)/sp(2) hybrids can be determined easily. These
observations, together with the carbon network structure deduced from the
Raman spectra, demonstrate that deposition temperature is an important fact
or in determining him properties such as sp(3) content. Specifically, it wa
s observed that the sp(3) content derived from the Raman spectra parameter
(I-D/I-G ratio) correlates well with that deduced from the XPS measurement
data. Copyright (C) 1999 John Wiley & Sons, Ltd.