A two-steps wet-etching fabrication process producing high-quality GaAs mic
rodisks is presented. We report an optical characterization of these microd
isks, using the photoluminescence of InAs quantum boxes as an internal ligh
t source. Thanks to an improved smoothness of the microdisk sidewall, cavit
y Q's as high as 12 000 are observed, which opens very challenging novel ap
plication prospects for semiconductor microdisks. (C) 1999 American Institu
te of Physics. [S0003-6951(99)00339-3].