We have studied the optical waveguide properties of sol-gel coated TiO2-SiO
2 composite thin films. With increasing TiO2 content the loss of thin films
was increased. The loss of thin films was increased and then decreased wit
h increasing annealing temperature. FT-IR spectra, XRD, AFM, and SEM analys
es showed that this loss resulted from the scattering of segregations and n
on-uniform distribution in the films. (C) 1999 Elsevier Science Ltd and Tec
hna S.r.l. All rights reserved.