Submicron laser writing on diamond

A synthesized HPHT IIb diamond plate is irradiated with a KrF excimer laser (wavelength;lambda = 248 nm, pulse duration tau = 20 ns). The beam is focu sed onto the surface with an ultrafluar objective [numerical aperture (NA) = 1]. The quality of the optical imaging system is first investigated by pe rforming atomic force microscopy (AFM) measurements on holes ablated into P erspex (PMMA). On diamond, holes are drilled at various pulse energies down to values slightly above the ablation threshold. The hole depth and width are measured by AFM after annealing in air at 600 degrees C during 3 h. Hol es with submicrometre diameters are obtained, and suggestions on how to pro duce even smaller holes are given. (C) 1999 Elsevier Science S.A. All right s reserved.