Nanoscale cobalt-copper multilayers prepared by pulsed laser deposition on
oxidized silicon substrate were investigated by means of transmission elect
ron microscopic (TEM) methods combined with energy dispersive X-ray spectro
scopy. The multilayers proved to be polycrystalline with grain sizes betwee
n some nanometers and the stack thickness. The topmost copper layer was inc
omplete with droplets up to 1 mu m. For single layer thicknesses greater th
an 4 nm it could be shown that the structure of the layer stacks was face c
entred cubic with hexagonal close packed parts in the cobalt layers.