Er, Yb, and Er, Yb (CO-)doped yttria thin films, deposited by an aerosol assisted MO-CVD process

Er, Yb and Er,Yb:Y2O3 thin films were deposited by an aerosol assisted MO-C VD atmospheric process. The source solution (rare earth 2,4-pentanedionates dissolved in butanol) is sprayed using an ultrasonic system. The films wer e obtained for deposition temperatures between 280 degrees C and 540 degree s C. At high temperature, the films are transparent, polycrystalline and sm ooth. We have used SEM, X-ray diffraction, EPMA, ellipsometry, and IR spect roscopy, for film characterisation. The Er3+ Luminescence was studied in TR and visible, where the classical green transitions have been observed. Mor e, there are numerous evidence of the existence of up-conversion phenomena. A I-4(13/2) lifetime of 2.2 ms was found for a sample containing 0.6 at. % of Er.