LPCVD boron carbonitride films from triethylamine borane

Authors
Kosinova, ML Fainer, NI Rumyantsev, YM Golubenko, AN Kuznetsov, FA
Citation
Ml. Kosinova et al., LPCVD boron carbonitride films from triethylamine borane, J PHYS IV, 9(P8), 1999, pp. 915-921
Citations number
22
Categorie Soggetti
Physics
Journal title
JOURNAL DE PHYSIQUE IV
ISSN journal
11554339 → ACNP
Volume
9
Issue
P8
Year of publication
1999
Part
2
Pages
915 - 921
Database
ISI
SICI code
1155-4339(199909)9:P8<915:LBCFFT>2.0.ZU;2-J
Abstract
Thin films of the B-C-N system have been synthesised by low pressure chemic al vapour deposition and plasma enhanced chemical vapour deposition using l iquid single source precursor triethylamine borane complex (TEAB) both with and without ammonia. The growth rates, refractive index, types of chemical bonds, the crystal structure and phase composition of films were studied d epending on the growth conditions. The thermodynamic analysis of the B-N-C- H system is presented.