CVD niobium in Nb-Hal-(H)-inert gas systems: A thermodynamic and experimental approaches

The thermodynamic analysis of the niobium CVD in Nb-Hal-(H)-inert gas (Hal = I, Cl) systems has been performed with using the method of minimization o f the Gibbs' free energy for the wide region of conditions. The results of the thermodynamic calculations allow to select the Nb-I-inert gas system as the more preferable hydrogen free system. The experimental niobium CVD dat a in the Nb-Cl-H-inert gas system were analyzed with thermodynamic view. Th e calculations and experimental results show a good agreement.