Modeling of mass-transportation of tris-(acetylacetonato)chromium(III) at atmospheric pressure

The main requirement to "hot" sources for MO CVD processes is stability of precursor vapor concentration in the area of substrate surface. Establishin g the mathematical models of sublimation process of precursor will allow gr eatly to accelerate a transition from results of the concrete experiment to the "hot" source development with necessary parameters. Possibility of ela borating similar mathematical model taking into account totality of experim ental parameters was approved on the example of description of sublimation process of tris(acetylacetonato)chromium(III) (Cr(acac)(3)). Modeling of su blimation process of Cr(acac)(3) for different conditions of experiment was carried out with using the notions of heat-mass-exchange theory. Criteria dependency satisfactory describing influence of experimental parameters on the rate of sublimation of molecular crystals of volatile Cr(acac)(3) was o btained. An empirical correlation, J = Const x T-2.18 x V-0.43 x exp(-Delta H/RT) x W-1.62 x L-0.386, is proposed to describe the rate of mass transfer. The W and L-are width an d length of sample, accordingly. This model satisfactory describes the whol e collection of experimental data and ensures forecasting of sublimation ra te under other conditions of the performance of the process.