Synthesis of nanocrystalline diamond by the direct ion beam deposition method

Nanocrystalline diamond has been synthesized on a mirror-polished Si(001) s ubstrate by means of direct ion beam deposition. Low-energy (80-200 eV) hyd rocarbon and hydrogen ions, generated in a Kaufman ion source, were used to bombard the substrates. The bombarded samples were characterized by high-r esolution transmission electron microscopy and Raman spectroscopy. Nanocrys talline diamond particles of random orientation were observed in a matrix o f amorphous carbon film on the Si(001) substrate. The size of the nanocryst alline diamond particles varied in the range of 50-300 Angstrom. The mechan ism of ion-induced formation of nanocrystalline diamond is discussed.