Variation of hardness with penetration in nanoindentation of a rough surfac
e is a compound effect of variation in asperity geometry with penetration,
designated geometric effect, and genuine property gradients with depth as m
ay exist in a near-surface zone. We simulate indentation of a rough surface
numerically to elucidate the geometric effects and validate it by some mod
el "macro" experiments. Finally, we formulate a general framework to deconv
olute genuine property variation by normalizing the measured hardness with
the geometric effect.