Ml. Weaver et al., Microcharacterization of liquid delivery metalorganic chemical vapor deposition processed thin film materials exhibiting giant magnetoresistance, J MATER RES, 14(5), 1999, pp. 2007-2011
Thin films of La0.6Ca0.4MnO3 (LCMO) have been produced on (001) oriented La
AlO3 (LAO) and yttrium-stabilized zirconia (YSZ) substrates by liquid-deliv
ery metalorganic chemical vapor deposition (LD-MOCVD), X-ray diffraction (X
RD) analyses showed that the films were epitaxially grown on LAO substrates
and were monocrystalline at a thickness of less than 500 Angstrom. At a th
ickness of greater than 500 Angstrom, the films became polycrystalline but
maintained their high texture (preferred crystalline orientation), Films gr
own on YSZ were always polycrystalline but were also highly oriented. Regar
dless of the substrate, the 1500 Angstrom thick polycrystalline films exhib
ited substantially significant magnetoresistance ratios even above room tem
perature.