A disappearing sintering aid was used to promote densification during the i
nitial and middle stages of sintering and to be removed in gaseous form fro
m the specimens during the final stage of sintering. From thermodynamic con
sideration such as assessment of Gibbs free energy change of formation of A
l2O3 compounds including metal-oxide and evaluation of the vapor pressure o
f metal-oxide, Li2O is expected to become a disappearing sintering aid for
AlN sintering. Doping with Li2O resulted in densification of AlN ceramics w
ith Y2O3 and CaO additives by sintering at a firing temperature of 1600 deg
rees C. The amount of Li2O in the specimens decreased by volatilization at
temperatures higher than 1300 degrees C, and its amount was at a level of s
everal ppm after firing at 1600 degrees C for 6 h. Low-temperature densific
ation of AlN specimens by addition of Li2O also caused the improvement of t
hermal conductivity and mechanical strength of sintered specimens. Present
results indicate that a Li2O addition is effective for ALN sintering. Furth
ermore, LiYO2 was also used as a new sintering aid instead of Li2O and Y2O3
, and the results of thermal conductivity and mechanical strength are shown
.