Synthesis and characterization of B-C-N compounds on molybdenum

B-C-N compounds were prepared on molybdenum by means of bias-assisted hot f ilament chemical vapor deposition (HFCVD), Effect of the substrate temperat ure (T-s) on the growth of B-C-N films has been investigated systematically by x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) based on the detailed analysis and calculation of the XPS, The subst rate temperature plays a key role in the formation of the bonding states, t he composition, and the surface morphology. Boron carbonitride is the main phase at all depositing temperatures, and the obtained compounds are as fol lows: B0.83C0.17 +. B0.39C0.35N0.26 at 873 K, B0.30C0.34N0.36 at 973 K, B0. 64C0.36 + B0.51C0.23N0.26 at 1073 K, B0.51C0.31N0.18 at 1173 K, and B0.37C0 .54N0.09 at 1273 K.