Dense and smooth epitaxial BaTiO3 thin films by the dipping-pyrolysis process

Dense and smooth BaTiO3 thin films were prepared on SrTiO3 (100) substrates by the dipping-pyrolysis process using a mixed precursor solution of bariu m and titanium naphthenates. Combination effects of prefiring [at 150-450 d egrees C in air or low oxygen partial pressure, p(O-2)] and final heat trea tment [at 850 degrees C in air or low p(O-2)] on preparation of BaTiO3 thin films were examined. An epitaxial BaTiO3 thin film with a dense and smooth surface consisting of nanosized grains about 70 nm was prepared by prefiri ng under low p(O-2) at 250 degrees C and final heat treatment under low p ( O-2) at 850 degrees C.